Sub-Nanometer Heterodyne Interferometry and Its Application in Dilatometry and Industrial Metrology
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Journal of Optomechatronics
سال: 2009
ISSN: 1559-9612,1559-9620
DOI: 10.1080/15599610903144153